Handbook metrology pdf

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It also shows them how to successfully apply optical metrology to a vast array of current engineering and scientific problems. It covers in great detail surface metrology and nanometrology and more importantly the areas where they overlap, thereby providing a quantitative means of controlling and predicting processes and performance. Trends and mechanisms are explained wit. It also includes four new chapters—nearly pages—on optical coherence tomography for industrial applications, interference microscopy for surface structure analysis, noncontact dimensional and profile metrology by video measurement, and optical metrology in manufacturing technology.

It describes cleanroom-based measurement technology used during the manufacture of silicon integrated circuits and covers model-based, critical dimension, overlay. To scientists and engineers, however, the answer is far from simple, and determining the answer demands consideration of an almost overwhelming number of factors.

With an intriguing blend of history, fundamentals, and technical details, the Handbook of Mass Measurement sets forth the details. In two easily searched volumes, the Wiley Handbook of Metrology provides a clear overview of both the fundamentals of metrology and recent advances.